Lithography

Direct-write laser lithography

The tabletop µMLA system is a cutting-edge laser writing system for chrome-on-glass photomask fabrication. It is suitable for a wide range of microscale applications including but are not limited to microfluidics, MEMS, micro-optics, microlens arrays, sensors, etc.

Tool specs:

Minimum feature size: 1 µm
Minimum lines and space: 1.5 µm
Maximum Exposure Area: 150 x 150 mm2
Laser wavelength: 365 nm

Contact photolithography

The OAI 200IR Mask Aligner is for mask alignment and UV exposure application for Microfluidics, MEMS, etc. It provides collimated UV light in Near or Deep UV using lamps ranging in power from 200 to 2000 watts, and it is capable of one micron resolution and alignment precision.

Tool specs:
Substrate stage:

X, Y Travel ±10mm
Z Travel 1,500 microns
Rotation ±3.5˚

Two-Photon Polymerization (2PP) printer

The NanoOne Bio 2PP printer The NanoOne’s bio combines the potential for biocompatible applications with the characteristic high precision and versatility of the NanoOne 1000, achieving unparalleled precision in 3D printing of structures in the presence of living cells. From creating cell models that mimic natural tissue topography to the sterile fabrication of cell scaffolds, NanoOne bio opens doors to a new era in biomedical research.

Stereolithography(SLA) 3D printer

Stereolithography, also known as vat photopolymerization or resin 3D printing, is an additive manufacturing process where a light source cures liquid resin into hardened plastic. 

Formlab 3B+ is an advanced low force SLA 3D printer designed to rapidly print 3D parts with high precision, and is compatible with a wide range of SLA materials including biocompatible and sterilizable materials.

Tool specs:

Technology : Low Force Stereolithography (LFS)
Layer height : 25 – 300 microns
Laser spot size : 85 microns
Laser power : 250mW

UltiMaker S7 3D printer

Tool specs:

Layer resolution:
0.25 mm nozzle: 150 – 60 micron, 0.4 mm nozzle: 200 – 20 micron
0.6 mm nozzle: 300 – 20 micron, 0.8 mm nozzle: 600 – 20 micron
XYZ resolution: 6.9, 6.9, 2.5 micron
Nozzle temperature: 180 – 280 °C
Nozzle heat-up time: < 2 minutes
Build plate leveling: Advanced active leveling with more accurate inductive sensors
Build plate: PEI-coated flexible steel build plate
Build plate heat-up time: < 5 minutes (from 20 to 60 °C)
Operating ambient temperature: 15 – 32 °C (59 – 90 °F)
Print head: Dual extrusion print head with an auto-nozzle lifting system, swappable print cores, and flood detection