Characterization

Microscopes

The Olympus MX63 microscope provides high-resolution inspection of microstructures. It has a large stage adaptable for large samples, and a yellow filter slider for photoresist observation. 

Tool specs:
Sample size capability: supports wafers up to 300 mm (12 inches)
Magnification: 5x to 50x
Camera: Olympus digital cameras and software for image capture and analysis
Illumination: LED with reflected and transmitted light options

The Microqubic MRCL700 3D microscope provides high-resolution 2D/3D imaging and videos of transparent, opaque and reflective samples from various angles. Imaging modes are 3D reflected-light, 3D transmitted-light, 2D upright, 2D inverted

Profilometer

The Bruker DXT-E stylus profilometer provides the fundamental capabilities needed to collect accurate step height and surface roughness measurements. 

Tool specs:
• Manual X/Y stage with 4″ x 4″”(100x100mm) of travel, no rotation available.
• 4 inch sample platform
• Scan length: 50 μm minimum to 55 mm maximum
• Vertical range: 524 μm 
• Vertical resolution: 0.1 nm at 6.5 μm range, 1 nm at 65.5 μm range and 8 nm at 524 μm range
• A step-height repeatability of 4 Å.

Four point probe

Everbeing’s four point probe uses the four co-linear probes on contact to determine the sheet resistance of your wafer or thin films. This four point probe stand can also be used for the following applications: slice resistivity, doping quality, metalization thickness, P/N Typing, V/I Measurement

Tool specs:
• Chuck: 8″
• Lever Driven Up/Down
• Probing Z Resolution: 10um
• Probe Pin Material: Tungsten Carbide
• Probe Pin Spacing: 40mil, 50mil, 62.5mil
• Probe Pin Spring: 45grams, 85grams, 180grams
• Probe Pin Diameter: 40.6um

Goniometer

The ramé-hart Model 290 Automated Goniometer includes a software-driven Automated Tilting Base for measuring advancing, receding, and roll-off angles as well as contact angle hysteresis. 

Tool specs:
• Stage Size: 2 x 3 in (51 x 76mm) 
• Sample Size: 3 in (76mm) deep x unlimited 
• Range: 0 to 180° contact angle 
• Resolution: 0.01°
• Accuracy: +/- 0.10°
• U1 Series Camera: 1/3” CCD, 100fps, 659 x 494 pixels 

Fourier transform infrared spectroscopy

The ALPHA II FTIR is a compact FT-IR spectrometer for chemical analysis and rapid material identification. It enables you to do quality control, quantifications and verification of raw materials. Measurements of liquid and solid samples can be made directly without the need for salt plate or specialized sample handling. 

Tool specs:
• Spectral Range: 400 – 4000 cm-1
• Spectral Resolution: 2 cm-1
• Modules: ATR, DRIFT, External Reflectance

Rheometer

The HR 30 is a premier research-grade rheometer for scientists looking to advance the boundaries of material science by exploiting its unparalleled measurement sensitivity and accuracy. With integrated linear Dynamic Mechanical Analysis, the HR 30’s two-in-one instrument capabilities empowers users to explore entirely new possibilities for mechanical testing.

Tool specs:
•Minimum Torque (nN.m) Oscillation: 0.3
• Minimum Torque (nN.m) Steady Shear: 1
• Maximum Torque (mN.m): 200
• Torque Resolution (nN.m): 0.1
• Minimum Frequency (Hz): 1.0E-07
• Maximum Frequency (Hz): 100
• Minimum Angular Velocity [1] (rad/s): 0
• Maximum Angular Velocity (rad/s): 300
• Displacement Resolution (nrad): 2
• Step Time, Strain (ms): 15
• Step Time, Rate (ms): 5
• Maximum Normal Force (N): 50
• Normal Force Sensitivity (N):0.005
• Normal Force Resolution (mN):0.5